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@inproceedings{768343, author = {Dvořák, Pavel and Janča, Jan}, address = {Praha}, booktitle = {Proceedings of XXVIII International Conference on Phenomena in Ionized Gases}, keywords = {ions; plasma ; capacitively coupled; hydrogen; nitrogen}, language = {eng}, location = {Praha}, isbn = {978-80-87026-01-4}, pages = {5P09-29}, publisher = {J. Schmidt, M. Šimek, S. Pekárek, V. Prukner}, title = {Measurement of ions in H2 - N2 capacitively coupled discharge}, year = {2007} }
TY - JOUR ID - 768343 AU - Dvořák, Pavel - Janča, Jan PY - 2007 TI - Measurement of ions in H2 - N2 capacitively coupled discharge PB - J. Schmidt, M. Šimek, S. Pekárek, V. Prukner CY - Praha SN - 9788087026014 KW - ions KW - plasma KW - capacitively coupled KW - hydrogen KW - nitrogen N2 - Neutral molecules and especially positive ions and their energy distributions were measured in low-pressure (ca 4 Pa) high frequency (13,56 MHz) capacitively coupled discharge ignited in the mixtures of hydrogen and nitrogen. Especially, the hydrogen-rich mixtures were investigated. Firstly, the energy dependence of the spectrometer was calculated and the ion energy distributions were corrected. The dominant ions were H3+ and HN2+. Ions without hydrogen (N2+ and N+) were significant only at low hydrogen concentration (less than 10%). Also a high amount of ions NH4+ was detected. The nitrogen addition caused a quite steep decrease of the dominant hydrogen ion H3+. Further, an unusual behaviour of NH4+ and H+ was observed. Concerning creation of neutral stable molecules, only a small amount of ammonia was detected. ER -
DVOŘÁK, Pavel and Jan JANČA. Measurement of ions in H2 - N2 capacitively coupled discharge. In \textit{Proceedings of XXVIII International Conference on Phenomena in Ionized Gases}. Praha: J. Schmidt, M. Šimek, S. Pekárek, V. Prukner, 2007, p.~5P09-29, 2 pp. ISBN~978-80-87026-01-4.
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