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@inproceedings{768343,
author = {Dvořák, Pavel and Janča, Jan},
address = {Praha},
booktitle = {Proceedings of XXVIII International Conference on Phenomena in Ionized Gases},
keywords = {ions; plasma ; capacitively coupled; hydrogen; nitrogen},
language = {eng},
location = {Praha},
isbn = {978-80-87026-01-4},
pages = {5P09-29},
publisher = {J. Schmidt, M. Šimek, S. Pekárek, V. Prukner},
title = {Measurement of ions in H2 - N2 capacitively coupled discharge},
year = {2007}
}
TY - JOUR
ID - 768343
AU - Dvořák, Pavel - Janča, Jan
PY - 2007
TI - Measurement of ions in H2 - N2 capacitively coupled discharge
PB - J. Schmidt, M. Šimek, S. Pekárek, V. Prukner
CY - Praha
SN - 9788087026014
KW - ions
KW - plasma
KW - capacitively coupled
KW - hydrogen
KW - nitrogen
N2 - Neutral molecules and especially positive ions and their energy distributions were measured in low-pressure (ca 4 Pa) high frequency (13,56 MHz) capacitively coupled discharge ignited in the mixtures of hydrogen and nitrogen. Especially, the hydrogen-rich mixtures were investigated. Firstly, the energy dependence of the spectrometer was calculated and the ion energy distributions were corrected. The dominant ions were H3+ and HN2+. Ions without hydrogen (N2+ and N+) were significant only at low hydrogen concentration (less than 10%). Also a high amount of ions NH4+ was detected. The nitrogen addition caused a quite steep decrease of the dominant hydrogen ion H3+. Further, an unusual behaviour of NH4+ and H+ was observed. Concerning creation of neutral stable molecules, only a small amount of ammonia was detected.
ER -
DVOŘÁK, Pavel and Jan JANČA. Measurement of ions in H2 - N2 capacitively coupled discharge. In \textit{Proceedings of XXVIII International Conference on Phenomena in Ionized Gases}. Praha: J. Schmidt, M. Šimek, S. Pekárek, V. Prukner, 2007, p.~5P09-29, 2 pp. ISBN~978-80-87026-01-4.
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