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@article{768407,
author = {Maršík, Přemysl and Humlíček, Josef},
article_location = {Weinheim},
article_number = {5},
keywords = {ellipsometry; rotating compensator},
language = {eng},
issn = {1610-1634},
journal = {physica status solidi (c)},
title = {Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment},
volume = {5},
year = {2008}
}
TY - JOUR
ID - 768407
AU - Maršík, Přemysl - Humlíček, Josef
PY - 2008
TI - Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment
JF - physica status solidi (c)
VL - 5
IS - 5
SP - 1064-1067
EP - 1064-1067
PB - WILEY-VCH Verlag GmbH
SN - 16101634
KW - ellipsometry
KW - rotating compensator
N2 - Rotating compensator ellipsometry using multi-plate retarders can suffer from various artifacts. Our measurements in the range from 1.4 to 6.2 eV revealed spurious oscillations in ellipsometric parameters. We assign these oscillations to the angular misalignment between the individual plates of the retarder. A simple model using Mueller matrix framework is constructed to describe the observed effects and to elucidate the origin of the artifacts. The model is used to predict the impact of the artifacts on the results of signal analysis, and a calibration procedure is presented. Finally, the knowledge of the origin of the artifacts has been successfully used to reduce substantially the spurious oscillations in measured data.
ER -
MARŠÍK, Přemysl and Josef HUMLÍČEK. Multiplate misalignment artifacts in rotating-complensator ellipsometry: Analysis and data treatment. \textit{physica status solidi (c)}. Weinheim: WILEY-VCH Verlag GmbH, 2008, vol.~5, No~5, p.~1064-1067. ISSN~1610-1634.
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