D 2008

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

KELAR, Lukáš, Vilma BURŠÍKOVÁ and Zdeněk BOCHNÍČEK

Basic information

Original name

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Name in Czech

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Authors

Edition

Brno, Czech Republic, CESPC II - Book of extended abstracts, p. 106-107, 2 pp. 2008

Publisher

Masaryk University, Brno

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

UT WoS

000208452600039

Keywords in English

carbon films ;PECVD

Tags

Změněno: 12/9/2008 16:49, Mgr. Lukáš Kelar

Abstract

ORIG CZ

V originále

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

In Czech

Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD

Links

GA106/05/0274, research and development project
Name: Víceúrovňové studium vztahů mezi mechanickými a mikrostrukturními charakteristikami materiálů
Investor: Czech Science Foundation, Multiscale approach to relationships between mechanical and microstructural characteristics of materials
GA202/07/1669, research and development project
Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích
Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface