KELAR, Lukáš, Vilma BURŠÍKOVÁ and Zdeněk BOCHNÍČEK. Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD. In CESPC II - Book of extended abstracts. Brno, Czech Republic: Masaryk University, Brno, 2008, p. 106-107. |
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@inproceedings{777295, author = {Kelar, Lukáš and Buršíková, Vilma and Bochníček, Zdeněk}, address = {Brno, Czech Republic}, booktitle = {CESPC II - Book of extended abstracts}, keywords = {carbon films ;PECVD}, language = {eng}, location = {Brno, Czech Republic}, pages = {106-107}, publisher = {Masaryk University, Brno}, title = {Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD}, year = {2008} }
TY - JOUR ID - 777295 AU - Kelar, Lukáš - Buršíková, Vilma - Bochníček, Zdeněk PY - 2008 TI - Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD PB - Masaryk University, Brno CY - Brno, Czech Republic KW - carbon films ;PECVD N2 - Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD ER -
KELAR, Lukáš, Vilma BURŠÍKOVÁ and Zdeněk BOCHNÍČEK. Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD. In \textit{CESPC II - Book of extended abstracts}. Brno, Czech Republic: Masaryk University, Brno, 2008, p.~106-107.
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