Detailed Information on Publication Record
2008
Deposition of Nanostructured Diamond-Like Carbon Films in Dual Frequency Capacitive Discharge
BURŠÍKOVÁ, Vilma, Vratislav PEŘINA, Jaroslav SOBOTA, Petr KLAPETEK, Pavel DVOŘÁK et. al.Basic information
Original name
Deposition of Nanostructured Diamond-Like Carbon Films in Dual Frequency Capacitive Discharge
Name in Czech
Depozice nanostrukrurovaných diamantu podobných uhlíkových vrstev v kapacitním výboji s dvojí frekvencí
Authors
BURŠÍKOVÁ, Vilma, Vratislav PEŘINA, Jaroslav SOBOTA, Petr KLAPETEK, Pavel DVOŘÁK, Adrian STOICA, Jiří BURŠÍK and Daniel FRANTA
Edition
19. vyd. Cordoba, Spain, 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases, 2 pp. 2008
Publisher
European Physical Society
Other information
Language
English
Type of outcome
Stať ve sborníku
Field of Study
10305 Fluids and plasma physics
Country of publisher
Spain
Confidentiality degree
není předmětem státního či obchodního tajemství
Organization unit
Faculty of Science
ISBN
2-914771-04-5
Tags
International impact, Reviewed
Změněno: 4/1/2009 15:46, Mgr. Daniel Franta, Ph.D.
V originále
The aim of the present work was to deposit nanostructured diamond-like carbon (NDLC) coatings with various admixtures (silicon, oxygen, nitrogen, tungsten etc.) on several different substrate materials (silicon, glass, polycarbonate and steel) in dual frequency capacitive r.f. discharges. For the plasma diagnostics the optical emission spectroscopy, capacitively coupled planar ion flux probe measurements and gas chromatography with mass spectrometry of stable plasma products were used. The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range from 1.5 to 6.5 eV. Laser Desorption-Ionisation – Time of Flight Mass Spectrometry (LDI-TOF) was used to study the deposited films. It was found that LDI-TOF mass spectrometry can serve as a rapid tool for the characterisation of NDLC layers with different admixtures. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of indentation techniques using Fischerscope H100 tester, Nanoindentor XP with CSM option and ultrananoindentor UNHT (CSM).
In Czech
The aim of the present work was to deposit nanostructured diamond-like carbon (NDLC) coatings with various admixtures (silicon, oxygen, nitrogen, tungsten etc.) on several different substrate materials (silicon, glass, polycarbonate and steel) in dual frequency capacitive r.f. discharges. For the plasma diagnostics the optical emission spectroscopy, capacitively coupled planar ion flux probe measurements and gas chromatography with mass spectrometry of stable plasma products were used. The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range from 1.5 to 6.5 eV. Laser Desorption-Ionisation – Time of Flight Mass Spectrometry (LDI-TOF) was used to study the deposited films. It was found that LDI-TOF mass spectrometry can serve as a rapid tool for the characterisation of NDLC layers with different admixtures. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of indentation techniques using Fischerscope H100 tester, Nanoindentor XP with CSM option and ultrananoindentor UNHT (CSM).
Links
| GA202/07/1669, research and development project |
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