FRANTA, Daniel, Martin HRDLIČKA, David NEČAS, Miloslav FRUMAR, Ivan OHLÍDAL and Martin PAVLIŠTA. Optical characterization of phase changing Ge2Sb2Te5 chalcogenide films. physica status solidi (c). Weinheim: WILEY-VCH Verlag GmbH, 2008, vol. 5, No 5, p. 1324-1327. ISSN 1610-1634. |
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@article{798278, author = {Franta, Daniel and Hrdlička, Martin and Nečas, David and Frumar, Miloslav and Ohlídal, Ivan and Pavlišta, Martin}, article_location = {Weinheim}, article_number = {5}, keywords = {thin-films; thermal-stability; dispersion model; rough surfaces; optical constants}, language = {eng}, issn = {1610-1634}, journal = {physica status solidi (c)}, title = {Optical characterization of phase changing Ge2Sb2Te5 chalcogenide films}, volume = {5}, year = {2008} }
TY - JOUR ID - 798278 AU - Franta, Daniel - Hrdlička, Martin - Nečas, David - Frumar, Miloslav - Ohlídal, Ivan - Pavlišta, Martin PY - 2008 TI - Optical characterization of phase changing Ge2Sb2Te5 chalcogenide films JF - physica status solidi (c) VL - 5 IS - 5 SP - 1324-1327 EP - 1324-1327 PB - WILEY-VCH Verlag GmbH SN - 16101634 KW - thin-films KW - thermal-stability KW - dispersion model KW - rough surfaces KW - optical constants N2 - The variable angle spectroscopic ellipsometry and spectroscopic reflectometry is used for the optical characterization of the as-deposited and annealed Ge2Sb2Te5 (GST) films. The dispersion model of the GST films is based on the parameterization of the density of electronic states. As a consequence of annealing, roughness of the upper boundaries of the GST films originates. This annealing also causes the evident redistribution of the density of electronic states from the higher energies to lower energies. The roughening and redistribution of the electrons are explained by means of the phase change of the GST films from amorphous to polycrystalline structure. This phase change is accompanied by changing the conductivity of the films that was proved by introducing the terms of the free carriers in the dispersion model of the CST films. ER -
FRANTA, Daniel, Martin HRDLIČKA, David NEČAS, Miloslav FRUMAR, Ivan OHLÍDAL and Martin PAVLIŠTA. Optical characterization of phase changing Ge2Sb2Te5 chalcogenide films. \textit{physica status solidi (c)}. Weinheim: WILEY-VCH Verlag GmbH, 2008, vol.~5, No~5, p.~1324-1327. ISSN~1610-1634.
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