FRANTA, Daniel, Ivan OHLÍDAL and David NEČAS. Optical quantities of rough films calculated by Rayleigh-Rice theory. physica status solidi (c). Weinheim: WILEY-VCH Verlag GmbH, 2008, vol. 5, No 5, p. 1395–1398. ISSN 1610-1634. |
Other formats:
BibTeX
LaTeX
RIS
@article{798388, author = {Franta, Daniel and Ohlídal, Ivan and Nečas, David}, article_location = {Weinheim}, article_number = {5}, keywords = {thin-films; rough film; ellipsometry; spectrophotometry}, language = {eng}, issn = {1610-1634}, journal = {physica status solidi (c)}, title = {Optical quantities of rough films calculated by Rayleigh-Rice theory}, volume = {5}, year = {2008} }
TY - JOUR ID - 798388 AU - Franta, Daniel - Ohlídal, Ivan - Nečas, David PY - 2008 TI - Optical quantities of rough films calculated by Rayleigh-Rice theory JF - physica status solidi (c) VL - 5 IS - 5 SP - 1395–1398 EP - 1395–1398 PB - WILEY-VCH Verlag GmbH SN - 16101634 KW - thin-films KW - rough film KW - ellipsometry KW - spectrophotometry N2 - Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy. ER -
FRANTA, Daniel, Ivan OHLÍDAL and David NEČAS. Optical quantities of rough films calculated by Rayleigh-Rice theory. \textit{physica status solidi (c)}. Weinheim: WILEY-VCH Verlag GmbH, 2008, vol.~5, No~5, p.~1395–1398. ISSN~1610-1634.
|