Detailed Information on Publication Record

FRANTA, Daniel, Ivan OHLÍDAL and David NEČAS. Optical quantities of rough films calculated by Rayleigh-Rice theory. physica status solidi (c). Weinheim: WILEY-VCH Verlag GmbH, 2008, vol. 5, No 5, p. 1395–1398. ISSN 1610-1634.

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Basic information
Original name	Optical quantities of rough films calculated by Rayleigh-Rice theory
Name in Czech	Optické veličiny drsných vrstev počítané pomocí Rayleigh-Riceovy teorie
Authors	FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic) and David NEČAS (203 Czech Republic).
Edition	physica status solidi (c), Weinheim, WILEY-VCH Verlag GmbH, 2008, 1610-1634.

Other information
Original language	English
Type of outcome	Article in a journal
Field of Study	10306 Optics
Country of publisher	Germany
Confidentiality degree	is not subject to a state or trade secret
RIV identification code	RIV/00216224:14310/08:00026960
Organization unit	Faculty of Science
UT WoS	000256862500095
Keywords in English	thin-films; rough film; ellipsometry; spectrophotometry
Tags	ellipsometry, rough film, Spectrophotometry, THIN-FILMS
Tags	International impact, Reviewed
Changed by	Changed by: Mgr. Daniel Franta, Ph.D., učo 2000. Changed: 3/7/2009 09:38.

Abstract
Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.

Abstract

Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.

Abstract (in Czech)
Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.

Abstract (in Czech)

Links
MSM0021622411, plan (intention)	Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
MSM0021622411, plan (intention)	Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface