Detailed Information on Publication Record
2008
Optical quantities of rough films calculated by Rayleigh-Rice theory
FRANTA, Daniel, Ivan OHLÍDAL and David NEČASBasic information
Original name
Optical quantities of rough films calculated by Rayleigh-Rice theory
Name in Czech
Optické veličiny drsných vrstev počítané pomocí Rayleigh-Riceovy teorie
Authors
FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic) and David NEČAS (203 Czech Republic)
Edition
physica status solidi (c), Weinheim, WILEY-VCH Verlag GmbH, 2008, 1610-1634
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10306 Optics
Country of publisher
Germany
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/08:00026960
Organization unit
Faculty of Science
UT WoS
000256862500095
Keywords in English
thin-films; rough film; ellipsometry; spectrophotometry
Tags
International impact, Reviewed
Změněno: 3/7/2009 09:38, Mgr. Daniel Franta, Ph.D.
V originále
Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.
In Czech
Experimental ellipsometric and spectroscopic data of a randomly rough silicon substrate are treated using several theoretical approaches. It is shown that the effective medium approximation and scalar diffraction theory are unsuitable approaches for treating the experimental data of rough surfaces containing spatial frequencies comparable with the wavelength of incident light. Using the Rayleigh-Rice theory one can obtain an excellent fit of the experimental data and very close agreement between the values of the statistical parameters determined using the optical method and atomic force microscopy.
Links
| MSM0021622411, plan (intention) |
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