Detailed Information on Publication Record
2008
Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies
OHLÍDAL, Ivan, David NEČAS and Daniel FRANTABasic information
Original name
Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies
Name in Czech
Spektroskopická elipsometrie a odrazivost statisticky drsných povrchů vykazující široký interval prostorových frekvencí
Authors
OHLÍDAL, Ivan (203 Czech Republic, guarantor), David NEČAS (203 Czech Republic) and Daniel FRANTA (203 Czech Republic)
Edition
physica status solidi (c), Weinheim, WILEY-VCH Verlag GmbH, 2008, 1610-1634
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10306 Optics
Country of publisher
Germany
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/08:00025069
Organization unit
Faculty of Science
UT WoS
000256862500096
Keywords in English
ellipsometry; spectrophotometry; rough surfaces
Tags
International impact, Reviewed
Změněno: 3/7/2009 09:40, Mgr. Daniel Franta, Ph.D.
V originále
Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy.
In Czech
Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy.
Links
| GA203/05/0524, research and development project |
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| MSM0021622411, plan (intention) |
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