OHLÍDAL, Ivan, David NEČAS and Daniel FRANTA. Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies. physica status solidi (c). Weinheim: WILEY-VCH Verlag GmbH, 2008, vol. 5, No 5, p. 1399–1402. ISSN 1610-1634.
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Basic information
Original name Spectroscopic ellipsometry and reflectometry of statistically rough surfaces exhibiting wide intervals of spatial frequencies
Name in Czech Spektroskopická elipsometrie a odrazivost statisticky drsných povrchů vykazující široký interval prostorových frekvencí
Authors OHLÍDAL, Ivan (203 Czech Republic, guarantor), David NEČAS (203 Czech Republic) and Daniel FRANTA (203 Czech Republic).
Edition physica status solidi (c), Weinheim, WILEY-VCH Verlag GmbH, 2008, 1610-1634.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10306 Optics
Country of publisher Germany
Confidentiality degree is not subject to a state or trade secret
RIV identification code RIV/00216224:14310/08:00025069
Organization unit Faculty of Science
UT WoS 000256862500096
Keywords in English ellipsometry; spectrophotometry; rough surfaces
Tags ellipsometry, rough surfaces, Spectrophotometry
Tags International impact, Reviewed
Changed by Changed by: Mgr. Daniel Franta, Ph.D., učo 2000. Changed: 3/7/2009 09:40.
Abstract
Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy.
Abstract (in Czech)
Two optical methods for the optical characterization of the statistically rough surfaces exhibiting wide intervals of spatial frequencies are presented. These methods employ the combination of variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry. The first method is based on combining the scalar diffraction theory and effective medium theory while the second method combines the scalar diffraction theory with Rayleigh-Rice theory. Both the methods are applied to the optical characterization of statistically rough GaAs surfaces prepared by thermal oxidation. It is shown that both the methods can be utilized for characterization of these surfaces in a reasonable way, however, the latter is more suitable for this purpose. The results of the optical characterization of the selected rough GaAs surface are supported by those obtained using atomic force microscopy.
Links
GA203/05/0524, research and development projectName: Fotonická skla a amorfní vrstvy
Investor: Czech Science Foundation, Photonics glasses and amorphous films
MSM0021622411, plan (intention)Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
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