STUDNIČKA, Filip, David TRUNEC, Pavel SŤAHEL, Vilma BURŠÍKOVÁ a Lukáš KELAR. DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE. Online. Chemické Listy, II Central European Symposium on Plasma Chemistry 2008. 2008, roč. 1, č. 16, s. 1510-1514. ISSN 1803-2389. [citováno 2024-04-23] |
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@article{800032, author = {Studnička, Filip and Trunec, David and Sťahel, Pavel and Buršíková, Vilma and Kelar, Lukáš}, article_number = {16}, keywords = {plasma deposition}, language = {eng}, issn = {1803-2389}, journal = {Chemické Listy, II Central European Symposium on Plasma Chemistry 2008}, title = {DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE}, volume = {1}, year = {2008} }
TY - JOUR ID - 800032 AU - Studnička, Filip - Trunec, David - Sťahel, Pavel - Buršíková, Vilma - Kelar, Lukáš PY - 2008 TI - DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE JF - Chemické Listy, II Central European Symposium on Plasma Chemistry 2008 VL - 1 IS - 16 SP - 1510-1514 EP - 1510-1514 SN - 18032389 KW - plasma deposition N2 - THIN FILMS WERE DEPOSITED IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE. THE HARDNESS OF THESE FILMS WAS INCREASED IN COMPARISON WITH FILMS DEPOSITED IN N2 + HMDSO ATMOSPHERE. ER -
STUDNIČKA, Filip, David TRUNEC, Pavel SŤAHEL, Vilma BURŠÍKOVÁ a Lukáš KELAR. DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE. Online. \textit{Chemické Listy, II Central European Symposium on Plasma Chemistry 2008}. 2008, roč.~1, č.~16, s.~1510-1514. ISSN~1803-2389. [citováno 2024-04-23]
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