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@article{800529, author = {Dvořák, Pavel and Moravec, Zdeněk}, article_location = {Brno}, article_number = {s1311-1538}, keywords = {plasma; discharge; higher harmonics; capacitive; matching}, language = {eng}, issn = {1803-2389}, journal = {Chemické listy}, title = {DEPENDENCE OF HIGHER HARMONIC FREQUENCIES MEASURED IN CAPACITIVELY COUPLED PLASMA ON THE MATCHING UNIT PARAMETERS}, volume = {102}, year = {2008} }
TY - JOUR ID - 800529 AU - Dvořák, Pavel - Moravec, Zdeněk PY - 2008 TI - DEPENDENCE OF HIGHER HARMONIC FREQUENCIES MEASURED IN CAPACITIVELY COUPLED PLASMA ON THE MATCHING UNIT PARAMETERS JF - Chemické listy VL - 102 IS - s1311-1538 SP - 1356 - 1359 EP - 1356 - 1359 PB - Česká společnost chemická SN - 18032389 KW - plasma KW - discharge KW - higher harmonics KW - capacitive KW - matching N2 - Higher harmonic frequencies of electric voltage and current are significant features of low-pressure capacitively coupled discharges. Their behaviour is quite complex since it is a function of many plasma and reactor parameters. This article deals with the influence of matching unit parameters on amplitudes of higher harmonics, which were measured by means of an uncompensated probe immersed into the plasma of an asymmetric capacitive discharge. Most of the harmonics reached their maxima in the case of optimal matching, i.e. when the RF power delivered to the discharge was maximal. However, the amount of the power delivered to the discharge did not explain the behaviour of higher harmonics sufficiently. It was shown that at our experimental conditions the behaviour of higher harmonics was determined by the sheath voltage. ER -
DVOŘÁK, Pavel and Zdeněk MORAVEC. DEPENDENCE OF HIGHER HARMONIC FREQUENCIES MEASURED IN CAPACITIVELY COUPLED PLASMA ON THE MATCHING UNIT PARAMETERS. \textit{Chemické listy}. Brno: Česká společnost chemická, 2008, vol.~102, s1311-1538, p.~1356 - 1359. ISSN~1803-2389.
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