| VAŠINA, Petr, Marcel MEŠKO, Ludovic DE POUCQUES, Jean BRETAGNE, Caroline BOISSE-LAPORTE and Michel TOUZEAU. Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2008, vol. 17, No 3, p. Article number 03507, 9 pp. ISSN 0963-0252. |
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@article{800643,
author = {Vašina, Petr and Meško, Marcel and de Poucques, Ludovic and Bretagne, Jean and BoisseandLaporte, Caroline and Touzeau, Michel},
article_location = {Bristol},
article_number = {3},
keywords = {high power pulses; magnetron},
language = {eng},
issn = {0963-0252},
journal = {Plasma Sources Science and Technology},
title = {Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport},
volume = {17},
year = {2008}
}
TY - JOUR
ID - 800643
AU - Vašina, Petr - Meško, Marcel - de Poucques, Ludovic - Bretagne, Jean - Boisse-Laporte, Caroline - Touzeau, Michel
PY - 2008
TI - Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport
JF - Plasma Sources Science and Technology
VL - 17
IS - 3
SP - Article number 03507
EP - Article number 03507
PB - Institute of Physics Publishing
SN - 09630252
KW - high power pulses
KW - magnetron
N2 - Papers study by means of time and space resolved measurement of substrate holder current the transport of ionized sputtered particlef from the magnetron cathode towards the substrate.
ER -
VAŠINA, Petr, Marcel MEŠKO, Ludovic DE POUCQUES, Jean BRETAGNE, Caroline BOISSE-LAPORTE and Michel TOUZEAU. Study of a fast high power pulsed magnetron discharge: role of plasma deconfinement on the charged particle transport. \textit{Plasma Sources Science and Technology}. Bristol: Institute of Physics Publishing, 2008, vol.~17, No~3, p.~Article number 03507, 9 pp. ISSN~0963-0252.
|
