| FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Monika KARÁSKOVÁ, Ondřej JAŠEK, David NEČAS, Petr KLAPETEK a Miroslav VALTR. Optical Characterization of Ultrananocrystalline Diamond Films. Diamond and Related Materials. New York: Elsevier, 2008, roč. 17, č. 1, s. 1278–1282. ISSN 0925-9635. |
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@article{806283,
author = {Franta, Daniel and Zajíčková, Lenka and Karásková, Monika and Jašek, Ondřej and Nečas, David and Klapetek, Petr and Valtr, Miroslav},
article_location = {New York},
article_number = {1},
keywords = {Nanocrystalline carbon; Optical properties characterization; Band structure},
language = {eng},
issn = {0925-9635},
journal = {Diamond and Related Materials},
title = {Optical Characterization of Ultrananocrystalline Diamond Films},
volume = {17},
year = {2008}
}
TY - JOUR
ID - 806283
AU - Franta, Daniel - Zajíčková, Lenka - Karásková, Monika - Jašek, Ondřej - Nečas, David - Klapetek, Petr - Valtr, Miroslav
PY - 2008
TI - Optical Characterization of Ultrananocrystalline Diamond Films
JF - Diamond and Related Materials
VL - 17
IS - 1
SP - 1278–1282
EP - 1278–1282
PB - Elsevier
SN - 09259635
KW - Nanocrystalline carbon
KW - Optical properties characterization
KW - Band structure
N2 - Optical properties of the ultrananocrystalline diamond films were studied by multisample method based on the combination of variable angle spectroscopic ellipsometry and spectroscopic reflectometry applied in the range 0.6-6.5 eV. The films were deposited by PECVD in a conventional bell jar (ASTeX type) reactor using dual frequency discharge, microwave cavity plasma and radio frequency plasma inducing dc self-bias at a substrate holder. The optical model of the samples included a surface roughness described by the Rayleigh-Rice theory and a refractive index profile in which Drude approximation was used. The results conformed with the present understanding of the polycrystalline diamond growth on the silicon substrate because the existence of silicon carbide and amorphous hydrogenated carbon film between the silicon substrate and nucleation layer was proved.
ER -
FRANTA, Daniel, Lenka ZAJÍČKOVÁ, Monika KARÁSKOVÁ, Ondřej JAŠEK, David NEČAS, Petr KLAPETEK a Miroslav VALTR. Optical Characterization of Ultrananocrystalline Diamond Films. \textit{Diamond and Related Materials}. New York: Elsevier, 2008, roč.~17, č.~1, s.~1278–1282. ISSN~0925-9635.
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