| OHLÍDAL, Ivan, David NEČAS, Vilma BURŠÍKOVÁ, Daniel FRANTA and Miloslav OHLÍDAL. Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry. Diamond and Related Materials. New York: Elsevier, 2008, vol. 17, No 1, p. 709–712. ISSN 0925-9635. |
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@article{806287,
author = {Ohlídal, Ivan and Nečas, David and Buršíková, Vilma and Franta, Daniel and Ohlídal, Miloslav},
article_location = {New York},
article_number = {1},
keywords = {Diamon-like carbon films; Non-uniformity in thickness; Material parameters; Optical constants},
language = {eng},
issn = {0925-9635},
journal = {Diamond and Related Materials},
title = {Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry},
volume = {17},
year = {2008}
}
TY - JOUR
ID - 806287
AU - Ohlídal, Ivan - Nečas, David - Buršíková, Vilma - Franta, Daniel - Ohlídal, Miloslav
PY - 2008
TI - Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
JF - Diamond and Related Materials
VL - 17
IS - 1
SP - 709–712
EP - 709–712
PB - Elsevier
SN - 09259635
KW - Diamon-like carbon films
KW - Non-uniformity in thickness
KW - Material parameters
KW - Optical constants
N2 - Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parameterization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films studied are calculated.
ER -
OHLÍDAL, Ivan, David NEČAS, Vilma BURŠÍKOVÁ, Daniel FRANTA and Miloslav OHLÍDAL. Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry. \textit{Diamond and Related Materials}. New York: Elsevier, 2008, vol.~17, No~1, p.~709–712. ISSN~0925-9635.
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