Detailed Information on Publication Record
2008
Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
OHLÍDAL, Ivan, David NEČAS, Vilma BURŠÍKOVÁ, Daniel FRANTA, Miloslav OHLÍDAL et. al.Basic information
Original name
Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
Name in Czech
Optická charakterizace diamantu podobných tenkých vrstev neuniformních v tloušťce za pomocí spektroskopické reflektometrie
Authors
OHLÍDAL, Ivan (203 Czech Republic, guarantor), David NEČAS (203 Czech Republic), Vilma BURŠÍKOVÁ (203 Czech Republic), Daniel FRANTA (203 Czech Republic) and Miloslav OHLÍDAL (203 Czech Republic)
Edition
Diamond and Related Materials, New York, Elsevier, 2008, 0925-9635
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10302 Condensed matter physics
Country of publisher
United States of America
Confidentiality degree
není předmětem státního či obchodního tajemství
Impact factor
Impact factor: 2.092
RIV identification code
RIV/00216224:14310/08:00025137
Organization unit
Faculty of Science
UT WoS
000256643300066
Keywords in English
Diamon-like carbon films; Non-uniformity in thickness; Material parameters; Optical constants
Změněno: 3/7/2009 09:44, Mgr. Daniel Franta, Ph.D.
V originále
Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parameterization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films studied are calculated.
In Czech
Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parameterization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films studied are calculated.
Links
| GA202/07/1669, research and development project |
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| MSM0021622411, plan (intention) |
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| MSM0021630518, plan (intention) |
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