Influence of cross-correlation effects on the optical quantities of rough films

FRANTA, Daniel, Ivan OHLÍDAL and David NEČAS. Influence of cross-correlation effects on the optical quantities of rough films. Optics Express. elektronicky: Optical Society of America, 2008, vol. 16, No 11, p. 7789–7803. ISSN 1094-4087.

Basic information

• Original name: Influence of cross-correlation effects on the optical quantities of rough films
• Name in Czech: Vliv vzájemných korelačních efektů na optické veličiny drsných vrstev
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic) and David NEČAS (203 Czech Republic).
• Edition: Optics Express, elektronicky, Optical Society of America, 2008, 1094-4087.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10306 Optics
• Country of publisher: United States of America
• Confidentiality degree: is not subject to a state or trade secret
• Impact factor: Impact factor: 3.880
• RIV identification code: RIV/00216224:14310/08:00025416
• Organization unit: Faculty of Science
• UT WoS: 000256469900025
• Keywords in English: Roughness; Rayleigh-Rice theory; Cross-correlation effects
• Tags: Cross-correlation effects, Rayleigh-Rice theory, Roughness
• Tags: International impact, Reviewed

Abstract

Within the Rayleigh-Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.

Abstract (in Czech)

Within the Rayleigh-Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.

Links

• FT-TA3/142, research and development project: Name: Analýza optických vlastností solárních článků.

Investor: Ministry of Industry and Trade of the CR

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface