Detailed Information on Publication Record
2008
Influence of cross-correlation effects on the optical quantities of rough films
FRANTA, Daniel, Ivan OHLÍDAL and David NEČASBasic information
Original name
Influence of cross-correlation effects on the optical quantities of rough films
Name in Czech
Vliv vzájemných korelačních efektů na optické veličiny drsných vrstev
Authors
FRANTA, Daniel (203 Czech Republic, guarantor), Ivan OHLÍDAL (203 Czech Republic) and David NEČAS (203 Czech Republic)
Edition
Optics Express, elektronicky, Optical Society of America, 2008, 1094-4087
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10306 Optics
Country of publisher
United States of America
Confidentiality degree
není předmětem státního či obchodního tajemství
Impact factor
Impact factor: 3.880
RIV identification code
RIV/00216224:14310/08:00025416
Organization unit
Faculty of Science
UT WoS
000256469900025
Keywords in English
Roughness; Rayleigh-Rice theory; Cross-correlation effects
Tags
International impact, Reviewed
Změněno: 3/7/2009 09:45, Mgr. Daniel Franta, Ph.D.
V originále
Within the Rayleigh-Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.
In Czech
Within the Rayleigh-Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.
Links
| FT-TA3/142, research and development project |
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| MSM0021622411, plan (intention) |
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