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@book{806486, author = {Wolf, Stanley and Tauber, Richard N.}, address = {Sunset Beach, California, U.S.A.}, keywords = {semiconductors; device fabrication}, location = {Sunset Beach, California, U.S.A.}, isbn = {978-0961672164}, publisher = {Lattice Press}, title = {Silicon Processing for the VLSI Era}, year = {1999} }
TY - BOOK ID - 806486 AU - Wolf, Stanley - Tauber, Richard N. PY - 1999 TI - Silicon Processing for the VLSI Era VL - Vol. 1: Process Technology PB - Lattice Press CY - Sunset Beach, California, U.S.A. SN - 9780961672164 KW - semiconductors KW - device fabrication ER -
WOLF, Stanley and Richard N. TAUBER. \textit{Silicon Processing for the VLSI Era}. Sunset Beach, California, U.S.A.: Lattice Press, 1999, 960 pp. Vol. 1: Process Technology. ISBN~978-0961672164.
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