Investigation of Neon RF Discharge by Means of Refined
Collisional-Radiative model

D 2008

Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

NAVRÁTIL, Zdeněk, Jana JURMANOVÁ, Pavel DVOŘÁK and David TRUNEC

Basic information

Original name

Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model

Name in Czech

Studium RF výboje v neonu pomocí srážkově-radiačního modelu

Authors

NAVRÁTIL, Zdeněk (203 Czech Republic, guarantor), Jana JURMANOVÁ (203 Czech Republic), Pavel DVOŘÁK (703 Slovakia) and David TRUNEC (203 Czech Republic)

Edition

Praha, Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008, p. 108-109, 1 pp. 2008

Publisher

ČVUT v Praze, Organizační výbor sympozia

Other information

Language

English

Type of outcome

Stať ve sborníku

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

není předmětem státního či obchodního tajemství

RIV identification code

RIV/00216224:14310/08:00025162

Organization unit

Faculty of Science

ISBN

978-80-01-04030-0

Keywords in English

rf discharge; collisional-radiative model; optical emission spectroscopy; neon

Abstract

ORIG CZ

V originále

A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. Moreover, the model was modified in order to determine the emission coefficient of unit plasma volume in absolute values. Since in previous work the measurement of relative intensities was found to be insufficient for determination of electron density, an absolute intensity measurement was performed. Jobin Yvon Horiba Triax 550 spectrometer, equipped with CCD camera, was calibrated by Oriel Tungsten-halogen filament lamp. The radiation of a defined narrow cylindrical region was taken out by means of two iris diaphragms, mounted at their common axis in front of the optical fibre. The temporal development of the plasma, important for the determination of real radiation time, was studied by Jobin Yvon Horiba FHR 1000 spectrometer with ICCD camera. The sensitivity of the model, as well as the influence of the newly incorporated processes on the results was evaluated. Assuming Maxwellian electron distribution function, without absolute intensity calibration the model is insensitive for electron temperatures below 4 eV.

In Czech

Dříve vyvinutý srážkově-radiační model byl použit ke studiu kapacitně vázaného RF výboje (13,56 MHz) v neonu. Spolu s absolutním měření intenzity záření bylo možné stanovit teplotu a koncentraci elektronů.

Links

GA202/06/0776, research and development project

Name: Pokročilý výzkum a vývoj zdrojů nízkoteplotního plazmatu

Investor: Czech Science Foundation

MSM0021622411, plan (intention)

Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface

Citovat

NAVRÁTIL, Zdeněk, Jana JURMANOVÁ, Pavel DVOŘÁK and David TRUNEC. Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model. In Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008. Praha: ČVUT v Praze, Organizační výbor sympozia, 2008, p. 108-109, 1 pp. ISBN 978-80-01-04030-0.

@inproceedings{807110,
   author = {Navrátil, Zdeněk and Jurmanová, Jana and Dvořák, Pavel and Trunec, David},
   address = {Praha},
   booktitle = {Programme & Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008},
   keywords = {rf discharge; collisional-radiative model; optical emission spectroscopy; neon},
   language = {eng},
   location = {Praha},
   isbn = {978-80-01-04030-0},
   pages = {108-109},
   publisher = {ČVUT v Praze, Organizační výbor sympozia},
   title = {Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model},
   year = {2008}
}

TY  - JOUR
ID  - 807110
AU  - Navrátil, Zdeněk - Jurmanová, Jana - Dvořák, Pavel - Trunec, David
PY  - 2008
TI  - Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model
PB  - ČVUT v Praze, Organizační výbor sympozia
CY  - Praha
SN  - 9788001040300
KW  - rf discharge
KW  - collisional-radiative model
KW  - optical emission spectroscopy
KW  - neon
N2  - A recently developed collisional-radiative (c-r) model for neon discharge was used to investigate the plasma properties of a capacitively coupled RF (13.56 MHz) discharge in neon. By means of c-r model, population of thirty excited states of neon atom and therefore optical emission spectrum for a given electron distribution function was determined. The discharge was studied by optical emission spectroscopy. By comparison of measured and calculated optical emission spectra on the basis of least-squares method the electron temperature or electron density was determined. The developed collisional-radiative model was refined in order to describe the studied plasma more correctly. Some important processes (as e.g. excitation transfer between 3s levels of neon atom induced by electron impact), were newly incorporated in the presented calculations. A 1/y-weighted sum of squares was used in the comparison of the spectra. Moreover, the model was modified in order to determine the emission coefficient of unit plasma volume in absolute values. Since in previous work the measurement of relative intensities was found to be insufficient for determination of electron density, an absolute intensity measurement was performed. Jobin Yvon Horiba Triax 550 spectrometer, equipped with CCD camera, was calibrated by Oriel Tungsten-halogen filament lamp. The radiation of a defined narrow cylindrical region was taken out by means of two iris diaphragms, mounted at their common axis in front of the optical fibre. The temporal development of the plasma, important for the determination of real radiation time, was studied by Jobin Yvon Horiba FHR 1000 spectrometer with ICCD camera. The sensitivity of the model, as well as the influence of the newly incorporated processes on the results was evaluated. Assuming Maxwellian electron distribution function, without absolute intensity calibration the model is insensitive for electron temperatures below 4 eV.
ER  -

NAVRÁTIL, Zdeněk, Jana JURMANOVÁ, Pavel DVOŘÁK and David TRUNEC. Investigation of Neon RF Discharge by Means of Refined Collisional-Radiative model. In \textit{Programme \&{} Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 13.-19.June 2008}. Praha: ČVUT v Praze, Organizační výbor sympozia, 2008, p.~108-109, 1 pp. ISBN~978-80-01-04030-0.

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