BURSIKOVA, Vilma, Pavel STAHEL, Jaroslav SOBOTA, Jan GROSSMAN, Tomas FORT, Zdenek BOCHNICEK, Petr KLAPETEK, Jiri BURSIK and Vratislav PERINA. Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings. In 2nd conference on New Diamond and Nano Carbons 2008. 2008.
Other formats:   BibTeX LaTeX RIS
Basic information
Original name Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings
Name in Czech Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings
Authors BURSIKOVA, Vilma, Pavel STAHEL, Jaroslav SOBOTA, Jan GROSSMAN, Tomas FORT, Zdenek BOCHNICEK, Petr KLAPETEK, Jiri BURSIK and Vratislav PERINA.
Edition 2nd conference on New Diamond and Nano Carbons 2008, 2008.
Other information
Original language English
Type of outcome Conference abstract
Field of Study 10305 Fluids and plasma physics
Country of publisher Taiwan
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
Keywords in English Study; thermal stability; Silicon; Oxygen; Nitrogen; Diamon-like Carbon coatings
Tags Diamon-like Carbon coatings, Nitrogen, Oxygen, Silicon, Study, thermal stability
Tags International impact
Changed by Changed by: Mgr. Adrian Stoica, Ph.D., učo 250983. Changed: 13/1/2009 14:39.
Abstract
The thermomechanical stability of diamond-like protective (DLC) films play a crucial role for their technological application and its study is of great importance. The main disadvantages of amorphous hydrogenated carbon (a-C:H) films prepared using PECVD are their low thermomechanical stability (due to hydrogen loss and graphitization at temperatures exceeding 300 C). After achieving this temperature the thermal degradation process starts due to the graphitization caused by hydrogen losses.
Abstract (in Czech)
The thermomechanical stability of diamond-like protective (DLC) films play a crucial role for their technological application and its study is of great importance. The main disadvantages of amorphous hydrogenated carbon (a-C:H) films prepared using PECVD are their low thermomechanical stability (due to hydrogen loss and graphitization at temperatures exceeding 300 C). After achieving this temperature the thermal degradation process starts due to the graphitization caused by hydrogen losses.
Links
GA202/07/1669, research and development projectName: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích
Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
PrintDisplayed: 18/7/2024 10:30