a 2008

Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings

BURSIKOVA, Vilma, Pavel STAHEL, Jaroslav SOBOTA, Jan GROSSMAN, Tomas FORT et. al.

Basic information

Original name

Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings

Name in Czech

Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings

Authors

BURSIKOVA, Vilma, Pavel STAHEL, Jaroslav SOBOTA, Jan GROSSMAN, Tomas FORT, Zdenek BOCHNICEK, Petr KLAPETEK, Jiri BURSIK and Vratislav PERINA

Edition

2nd conference on New Diamond and Nano Carbons 2008, 2008

Other information

Language

English

Type of outcome

Konferenční abstrakt

Field of Study

10305 Fluids and plasma physics

Country of publisher

Taiwan

Confidentiality degree

není předmětem státního či obchodního tajemství

Organization unit

Faculty of Science

Keywords in English

Study; thermal stability; Silicon; Oxygen; Nitrogen; Diamon-like Carbon coatings

Tags

Tags

International impact
Změněno: 13/1/2009 14:39, Mgr. Adrian Stoica, Ph.D.

Abstract

ORIG CZ

V originále

The thermomechanical stability of diamond-like protective (DLC) films play a crucial role for their technological application and its study is of great importance. The main disadvantages of amorphous hydrogenated carbon (a-C:H) films prepared using PECVD are their low thermomechanical stability (due to hydrogen loss and graphitization at temperatures exceeding 300 C). After achieving this temperature the thermal degradation process starts due to the graphitization caused by hydrogen losses.

In Czech

The thermomechanical stability of diamond-like protective (DLC) films play a crucial role for their technological application and its study is of great importance. The main disadvantages of amorphous hydrogenated carbon (a-C:H) films prepared using PECVD are their low thermomechanical stability (due to hydrogen loss and graphitization at temperatures exceeding 300 C). After achieving this temperature the thermal degradation process starts due to the graphitization caused by hydrogen losses.

Links

GA202/07/1669, research and development project
Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích
Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges