Detailed Information on Publication Record
2008
Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition
BURSIKOVA, Vilma, Miroslav VALTR, Petr KLAPETEL, Jiri BURSIK, Olga BLAHOVA et. al.Basic information
Original name
Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition
Name in Czech
Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition
Authors
BURSIKOVA, Vilma, Miroslav VALTR, Petr KLAPETEL, Jiri BURSIK, Olga BLAHOVA and Ivan OHLIDAL
Edition
2008
Other information
Language
English
Type of outcome
Konferenční abstrakt
Field of Study
10305 Fluids and plasma physics
Country of publisher
Taiwan
Confidentiality degree
není předmětem státního či obchodního tajemství
Organization unit
Faculty of Science
Keywords in English
Nanoindentation; amorphous carbon films; plasma enchanced chemical vapor deposition
Tags
International impact
Změněno: 13/1/2009 15:06, Mgr. Adrian Stoica, Ph.D.
V originále
In the past two decades, there is a great industrial interest in preparation of amorphous hydrogenated carbon (a-C:H) thin films in a wide range of applications such as nanoelectronics, optical devices, integrated digital circuits, micro-electromechanical devices (MEMs), biomedical coatings, etc. The mechanical properties such as hardness, wear resistance, fracture toughness, film-substrate adhesion, thermo-mechanical stability of the coating-substrate system play always a crucial role for industrial applications of the films.
In Czech
In the past two decades, there is a great industrial interest in preparation of amorphous hydrogenated carbon (a-C:H) thin films in a wide range of applications such as nanoelectronics, optical devices, integrated digital circuits, micro-electromechanical devices (MEMs), biomedical coatings, etc. The mechanical properties such as hardness, wear resistance, fracture toughness, film-substrate adhesion, thermo-mechanical stability of the coating-substrate system play always a crucial role for industrial applications of the films.
Links
| GA202/07/1669, research and development project |
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| KAN311610701, research and development project |
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