BURSIKOVA, Vilma, Miroslav VALTR, Petr KLAPETEL, Jiri BURSIK, Olga BLAHOVA and Ivan OHLIDAL. Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition. 2008.
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Basic information
Original name Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition
Name in Czech Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition
Authors BURSIKOVA, Vilma, Miroslav VALTR, Petr KLAPETEL, Jiri BURSIK, Olga BLAHOVA and Ivan OHLIDAL.
Edition 2008.
Other information
Original language English
Type of outcome Conference abstract
Field of Study 10305 Fluids and plasma physics
Country of publisher Taiwan
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
Keywords in English Nanoindentation; amorphous carbon films; plasma enchanced chemical vapor deposition
Tags amorphous carbon films, Nanoindentation
Tags International impact
Changed by Changed by: Mgr. Adrian Stoica, Ph.D., učo 250983. Changed: 13/1/2009 15:06.
Abstract
In the past two decades, there is a great industrial interest in preparation of amorphous hydrogenated carbon (a-C:H) thin films in a wide range of applications such as nanoelectronics, optical devices, integrated digital circuits, micro-electromechanical devices (MEMs), biomedical coatings, etc. The mechanical properties such as hardness, wear resistance, fracture toughness, film-substrate adhesion, thermo-mechanical stability of the coating-substrate system play always a crucial role for industrial applications of the films.
Abstract (in Czech)
In the past two decades, there is a great industrial interest in preparation of amorphous hydrogenated carbon (a-C:H) thin films in a wide range of applications such as nanoelectronics, optical devices, integrated digital circuits, micro-electromechanical devices (MEMs), biomedical coatings, etc. The mechanical properties such as hardness, wear resistance, fracture toughness, film-substrate adhesion, thermo-mechanical stability of the coating-substrate system play always a crucial role for industrial applications of the films.
Links
GA202/07/1669, research and development projectName: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích
Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
KAN311610701, research and development projectName: Nanometrologie využívající metod rastrovací sondové mikroskopie
Investor: Academy of Sciences of the Czech Republic
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