Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor ...
BURSIKOVA, Vilma, Miroslav VALTR, Petr KLAPETEL, Jiri BURSIK, Olga BLAHOVA and Ivan OHLIDAL. Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition. 2008. |
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Basic information | |
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Original name | Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition |
Name in Czech | Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition |
Authors | BURSIKOVA, Vilma, Miroslav VALTR, Petr KLAPETEL, Jiri BURSIK, Olga BLAHOVA and Ivan OHLIDAL. |
Edition | 2008. |
Other information | |
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Original language | English |
Type of outcome | Conference abstract |
Field of Study | 10305 Fluids and plasma physics |
Country of publisher | Taiwan |
Confidentiality degree | is not subject to a state or trade secret |
Organization unit | Faculty of Science |
Keywords in English | Nanoindentation; amorphous carbon films; plasma enchanced chemical vapor deposition |
Tags | amorphous carbon films, Nanoindentation |
Tags | International impact |
Changed by | Changed by: Mgr. Adrian Stoica, Ph.D., učo 250983. Changed: 13/1/2009 15:06. |
Abstract |
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In the past two decades, there is a great industrial interest in preparation of amorphous hydrogenated carbon (a-C:H) thin films in a wide range of applications such as nanoelectronics, optical devices, integrated digital circuits, micro-electromechanical devices (MEMs), biomedical coatings, etc. The mechanical properties such as hardness, wear resistance, fracture toughness, film-substrate adhesion, thermo-mechanical stability of the coating-substrate system play always a crucial role for industrial applications of the films. |
Abstract (in Czech) |
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In the past two decades, there is a great industrial interest in preparation of amorphous hydrogenated carbon (a-C:H) thin films in a wide range of applications such as nanoelectronics, optical devices, integrated digital circuits, micro-electromechanical devices (MEMs), biomedical coatings, etc. The mechanical properties such as hardness, wear resistance, fracture toughness, film-substrate adhesion, thermo-mechanical stability of the coating-substrate system play always a crucial role for industrial applications of the films. |
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GA202/07/1669, research and development project | Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích |
Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges | |
KAN311610701, research and development project | Name: Nanometrologie využívající metod rastrovací sondové mikroskopie |
Investor: Academy of Sciences of the Czech Republic |
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