| OHLÍDAL, Ivan, David NEČAS, Daniel FRANTA and Vilma BURŠÍKOVÁ. Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry. Diamond and Related Materials. New York: Elsevier Science S.A., 2009, vol. 18, 2-3, p. 364-367. ISSN 0925-9635. Available from: https://dx.doi.org/10.1016/j.diamond.2008.09.003. |
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@article{808473,
author = {Ohlídal, Ivan and Nečas, David and Franta, Daniel and Buršíková, Vilma},
article_location = {New York},
article_number = {2-3},
doi = {http://dx.doi.org/10.1016/j.diamond.2008.09.003},
keywords = {diamond-like carbon films; thickness non-uniformity; material parameters; optical constants},
language = {eng},
issn = {0925-9635},
journal = {Diamond and Related Materials},
title = {Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry},
url = {https://doi.org/10.1016/j.diamond.2008.09.003},
volume = {18},
year = {2009}
}
TY - JOUR
ID - 808473
AU - Ohlídal, Ivan - Nečas, David - Franta, Daniel - Buršíková, Vilma
PY - 2009
TI - Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry
JF - Diamond and Related Materials
VL - 18
IS - 2-3
SP - 364-367
EP - 364-367
PB - Elsevier Science S.A.
SN - 09259635
KW - diamond-like carbon films
KW - thickness non-uniformity
KW - material parameters
KW - optical constants
UR - https://doi.org/10.1016/j.diamond.2008.09.003
L2 - https://doi.org/10.1016/j.diamond.2008.09.003
N2 - In practice many films prepared using various technologies exhibit stronger or slighter area non-uniformity. Diamond-like carbon (DLC) films are also prepared with this non-uniformity sometimes. In this contribution will be shown how to take into account the thickness non-uniformity of the films when their optical characterization is carried out using spectrometric ellipsometry. Two new formulas expressing each of the three associated ellipsometric parameters, i.e. three components of the Stokes vector, of the films exhibiting thickness non-uniformity will be presented for phase modulated ellipsometry.
ER -
OHLÍDAL, Ivan, David NEČAS, Daniel FRANTA and Vilma BURŠÍKOVÁ. Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry. \textit{Diamond and Related Materials}. New York: Elsevier Science S.A., 2009, vol.~18, 2-3, p.~364-367. ISSN~0925-9635. Available from: https://dx.doi.org/10.1016/j.diamond.2008.09.003.
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