| BURSIKOVA, Vilma, Vratislav PERINA, Jaroslav SOBOTA, Jan GROSSMAN, Petr KLAPETEK, Jiri BURSIK, Daniel FRANTA, Ivan OHLIDAL, Lenka ZAJICKOVA, Josef HAVEL and Jan JANCA. Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges. In 2nd conference on New Diamond and Nano Carbons 2008. 2008. |
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@proceedings{808478,
author = {Bursikova, Vilma and Perina, Vratislav and Sobota, Jaroslav and Grossman, Jan and Klapetek, Petr and Bursik, Jiri and Franta, Daniel and Ohlidal, Ivan and Zajickova, Lenka and Havel, Josef and Janca, Jan},
booktitle = {2nd conference on New Diamond and Nano Carbons 2008},
keywords = {Characterization; nanostructured diamond-like carbon coatings; single; dual frequency capacitive discharge},
language = {eng},
title = {Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges},
year = {2008}
}
TY - CONF
ID - 808478
AU - Bursikova, Vilma - Perina, Vratislav - Sobota, Jaroslav - Grossman, Jan - Klapetek, Petr - Bursik, Jiri - Franta, Daniel - Ohlidal, Ivan - Zajickova, Lenka - Havel, Josef - Janca, Jan
PY - 2008
TI - Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges
KW - Characterization
KW - nanostructured diamond-like carbon coatings
KW - single
KW - dual frequency capacitive discharge
N2 - Nanostructured diamond-like carbon coatings with various doping (Si, O, N) were deposited on several different substrate materials (silicon, glass, polycarbonate and steel) in single (13.56 MHz) and dual capacitive r.f. discharges. The aim of the present work was to compare the properties of NDLC films prepared in single and dual-frequency capacitive plasmas (DFCCP). The objective of our study was to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven substrate surfaces and significant lowering of the internal stress in films.
ER -
BURSIKOVA, Vilma, Vratislav PERINA, Jaroslav SOBOTA, Jan GROSSMAN, Petr KLAPETEK, Jiri BURSIK, Daniel FRANTA, Ivan OHLIDAL, Lenka ZAJICKOVA, Josef HAVEL and Jan JANCA. Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges. In \textit{2nd conference on New Diamond and Nano Carbons 2008}. 2008.
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