NEČAS, David, Ivan OHLÍDAL and Daniel FRANTA. Reflectance of non-uniform thin films. Journal of Optics A: Pure and Applied Optics. Bristol, GB: IOP Publishing Ltd, 2009, vol. 11, No 4, p. 1-9. ISSN 1464-4258. |
Other formats:
BibTeX
LaTeX
RIS
@article{824022, author = {Nečas, David and Ohlídal, Ivan and Franta, Daniel}, article_location = {Bristol, GB}, article_number = {4}, keywords = {thin films; thickness non-uniformity; spectrophotometry}, language = {eng}, issn = {1464-4258}, journal = {Journal of Optics A: Pure and Applied Optics}, title = {Reflectance of non-uniform thin films}, volume = {11}, year = {2009} }
TY - JOUR ID - 824022 AU - Nečas, David - Ohlídal, Ivan - Franta, Daniel PY - 2009 TI - Reflectance of non-uniform thin films JF - Journal of Optics A: Pure and Applied Optics VL - 11 IS - 4 SP - 1-9 EP - 1-9 PB - IOP Publishing Ltd SN - 14644258 KW - thin films KW - thickness non-uniformity KW - spectrophotometry N2 - A general formula for the reflectance of a thin film with non-uniform thickness is derived based on expressing its thickness distribution density. Examples of such thickness distribution densities, corresponding to various shapes of the thickness non-uniformity, are presented. In addition, a reflectance formula is derived as the second-order approximation of the general formula expanded into a power series in the root mean square (rms) value of the thickness distribution. By means of a numerical analysis, it is shown that for greater non-uniformities it is necessary to take into account their concrete shapes in the optical characterization, whereas for small non-uniformities the concrete shape is of no importance for the characterization. The theoretical results are applied to the complete optical characterization of a selected non-uniform carbon nitride film. ER -
NEČAS, David, Ivan OHLÍDAL and Daniel FRANTA. Reflectance of non-uniform thin films. \textit{Journal of Optics A: Pure and Applied Optics}. Bristol, GB: IOP Publishing Ltd, 2009, vol.~11, No~4, p.~1-9. ISSN~1464-4258.
|