Higher harmonics of plasma potential in capacitively coupled discharges

DVOŘÁK, Pavel and Zdeněk MORAVEC. Higher harmonics of plasma potential in capacitively coupled discharges. In Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts. Brno: VUT Brno, 2009, p. 57. ISBN 978-80-214-3875-0.

Basic information

Original name

Higher harmonics of plasma potential in capacitively coupled discharges

Name in Czech

Vyšší harmoniky potenciálu plazmatu kapacitně vázaných výbojů

Authors

DVOŘÁK, Pavel (203 Czech Republic, guarantor) and Zdeněk MORAVEC (203 Czech Republic)

Edition

Brno, Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts, p. 57-57, 2009

Publisher

VUT Brno

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Other information

Language

English

Type of outcome

Proceedings paper

Field of Study

10305 Fluids and plasma physics

Country of publisher

Czech Republic

Confidentiality degree

is not subject to a state or trade secret

RIV identification code

RIV/00216224:14310/09:00035970

Organization unit

Faculty of Science

ISBN

978-80-214-3875-0

Keywords (in Czech)

vyšší harmoniky; plazma; potenciál plazmatu

Keywords in English

higher harmonics; plasma; discharge; plasma potential

Tags

discharge, higher harmonics, plasma, plasma potential

Tags

International impact

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Abstract

V originále

Measurement of the waveform of the plasma potential and its harmonic frequencies was made by means of an uncompensated probe. The analysis of the measured data requires a model of the sheath around the probe.

In Czech

Měření vyšších harmonických frekvencí potenciálu plazmatu v kapacitně vázaných výbojích pomocí nekompenzované sondy.

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Links

MSM0021622411, plan (intention)

Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface