Detailed Information on Publication Record
2009
Is it possible to control degree of target poisoning during RF reactive magnetron sputtering by higher harmonic frequencies of discharge voltage?
VAŠINA, Petr and Pavel DVOŘÁKBasic information
Original name
Is it possible to control degree of target poisoning during RF reactive magnetron sputtering by higher harmonic frequencies of discharge voltage?
Name in Czech
Lze kontrolovat otravu terče při magnetronovém naprašování pomocí vyšších harmonických frekvencí výbojového napětí?
Authors
VAŠINA, Petr (203 Czech Republic, guarantor) and Pavel DVOŘÁK (203 Czech Republic)
Edition
Brno, Frontiers in Low Temperature Plasma Diagnostics 8 - Book of abstracts, p. 74-74, 2009
Publisher
VUT Brno
Other information
Language
English
Type of outcome
Stať ve sborníku
Field of Study
10305 Fluids and plasma physics
Country of publisher
Czech Republic
Confidentiality degree
není předmětem státního či obchodního tajemství
RIV identification code
RIV/00216224:14310/09:00029369
Organization unit
Faculty of Science
ISBN
978-80-214-3875-0
Keywords (in Czech)
vyšší harmoniky; plazma; magnetron; naprašování
Keywords in English
higher harmonics; plasma; discharge; reactive sputtering; magnetron
Tags
International impact
Změněno: 24/6/2009 13:46, doc. Mgr. Pavel Dvořák, Ph.D.
V originále
Reactive sputtering controlled by flow of the reactive gas suffers from problems in processing stability caused by an abrupt transition between the metallic and the compound mode. During this transition many important parameters including target composition and gas composition change dramatically. A sensitive monitoring method is proposed which is based on the measurement of amplitudes of fundamental or higher harmonic frequencies of discharge voltages. Voltage waveforms recorded from the cathode and from an uncompensated probe were analyzed. Uncompensated probe exhibited higher sensitivity significantly better than sensitivity of any other known electrical method used for the control of magnetron sputtering process. Moreover, some particular experiments show that the changes in amplitudes of the harmonics by the transition are due to the changes of the target composition rather than due the change of the gas composition.
In Czech
Kontrola otrávení terče při magnetronovém naprašování pomocí vyšších harmonických frekvencí napětí.
Links
| GP202/08/P038, research and development project |
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| MSM0021622411, plan (intention) |
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