Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)

HOUŠKA, Jan, Vilma BURŠÍKOVÁ and Josef HAVEL. Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si). In Frontiers in Low Temperature Plasma Diagnostics 8. 1st ed. Brno: JČMF, 2009, p. 46. ISBN 978-80-214-3875-0.

Basic information

• Original name: Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)
• Name in Czech: Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)
• Authors: HOUŠKA, Jan, Vilma BURŠÍKOVÁ and Josef HAVEL.
• Edition: 1. vyd. Brno, Frontiers in Low Temperature Plasma Diagnostics 8, p. 46-46, 2009.
• Publisher: JČMF

Other information

• Original language: English
• Type of outcome: Proceedings paper
• Field of Study: 10302 Condensed matter physics
• Country of publisher: Czech Republic
• Confidentiality degree: is not subject to a state or trade secret
• Organization unit: Faculty of Science
• ISBN: 978-80-214-3875-0
• Keywords (in Czech): Laser ablation; time-of-flight mass spectrometry; silicon doped diamond-like carbon
• Keywords in English: Laser ablation; time-of-flight mass spectrometry; silicon doped diamond-like carbon
• Tags: laser ablation, silicon doped diamond-like carbon, time-of-flight mass spectrometry

Abstract

Silicon-doped diamond-like carbon (DLC-Si) was prepared by plasma-enhanced chemical vapor deposition (PECVD) technique from a mixture of hexamethyldisiloxane (HMDSO) and oxygen using dual frequenci capacitive discharge. Time of flight mass spectrometer equipped with nitrogen laser (337 nm) was used to charakterize its structure via laser ablation. Stoichometry of positively or negatively charged species was confirmed via isotopic pattern simulation. DLC-Si material shows typical spectral patterns similar to those diamond-like carbon. In addition, chemical bound of Si-C in this material was proved and many positively or negatively charged O(m)Si(n)C(o)H(p) species were identified in plasma plume.

Abstract (in Czech)

Silicon-doped diamond-like carbon (DLC-Si) was prepared by plasma-enhanced chemical vapor deposition (PECVD) technique from a mixture of hexamethyldisiloxane (HMDSO) and oxygen using dual frequenci capacitive discharge. Time of flight mass spectrometer equipped with nitrogen laser (337 nm) was used to charakterize its structure via laser ablation. Stoichometry of positively or negatively charged species was confirmed via isotopic pattern simulation. DLC-Si material shows typical spectral patterns similar to those diamond-like carbon. In addition, chemical bound of Si-C in this material was proved and many positively or negatively charged O(m)Si(n)C(o)H(p) species were identified in plasma plume.

Links

• GA202/07/1669, research and development project: Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích

Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges

• KAN311610701, research and development project: Name: Nanometrologie využívající metod rastrovací sondové mikroskopie

Investor: Academy of Sciences of the Czech Republic

• MSM4977751303, plan (intention): Name: Predikce poruch heterogenních materiálů, komponent mechanických a biomechanických systémů.