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@inproceedings{839392, author = {Zajíčková, Lenka and Kučerová, Zuzana and Buršíková, Vilma and Franta, Daniel and Peřina, Vratislav and Macková, Anna}, address = {WARRENDALE}, booktitle = {ORGANIC/INORGANIC HYBRID MATERIALS - 2007}, keywords = {THIN-FILMS; HYBRID; DEPOSITION; SILICA; MODEL}, language = {eng}, location = {WARRENDALE}, isbn = {978-1-55899-967-1}, pages = {159-164}, publisher = {MATERIALS RESEARCH SOCIETY}, title = {Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane}, year = {2008} }
TY - JOUR ID - 839392 AU - Zajíčková, Lenka - Kučerová, Zuzana - Buršíková, Vilma - Franta, Daniel - Peřina, Vratislav - Macková, Anna PY - 2008 TI - Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane PB - MATERIALS RESEARCH SOCIETY CY - WARRENDALE SN - 9781558999671 KW - THIN-FILMS KW - HYBRID KW - DEPOSITION KW - SILICA KW - MODEL N2 - Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests. ER -
ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Vratislav PEŘINA and Anna MACKOVÁ. Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane. In \textit{ORGANIC/INORGANIC HYBRID MATERIALS - 2007}. WARRENDALE: MATERIALS RESEARCH SOCIETY, 2008, p.~159-164. ISBN~978-1-55899-967-1.
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