Detailed Information on Publication Record
2008
Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Vratislav PEŘINA et. al.Basic information
Original name
Composition and functional properties of organosilicon plasma polymers from hexamethyldisiloxane and octamethylcyclotetrasiloxane
Name in Czech
Složení a funkční vlastnosti organosilikonových polymerů vytvářených z hexamethyldisiloxanu a octamethylcyclotetrasiloxanu
Authors
ZAJÍČKOVÁ, Lenka, Zuzana KUČEROVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, Vratislav PEŘINA and Anna MACKOVÁ
Edition
WARRENDALE, ORGANIC/INORGANIC HYBRID MATERIALS - 2007, p. 159-164, 6 pp. 2008
Publisher
MATERIALS RESEARCH SOCIETY
Other information
Language
English
Type of outcome
Stať ve sborníku
Field of Study
10305 Fluids and plasma physics
Country of publisher
United Kingdom of Great Britain and Northern Ireland
Confidentiality degree
není předmětem státního či obchodního tajemství
Organization unit
Faculty of Science
ISBN
978-1-55899-967-1
ISSN
UT WoS
000256796400019
Keywords in English
THIN-FILMS; HYBRID; DEPOSITION; SILICA; MODEL
Tags
Tags
International impact, Reviewed
Změněno: 27/3/2013 09:19, doc. Mgr. Lenka Zajíčková, Ph.D.
V originále
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
In Czech
Hybrid organic-inorganic thin films with different fractions of silicon oxide were deposited in rf capacitively coupled discharges using pure hexamethyldisiloxane (HMDSO), octamethylcyclotetrasiloxane (D4) or 5 % HMDSO in O-2. The deposition in continuous wave (cw) mode was compared with pulsed conditions under which the discharge on-time was 5 ms and the off-time varied from 0.5 to 15 ms. The chemical composition of the films was studied by FTIR, RBS and ERDA. Their optical properties in UV/visible/NIR were determined from spectroscopic ellipsometry and reflectance measurements fitted with a Kramers-Kronig consistent dispersion model based on a parametrization of density of states. Film hardness and reduced modulus were determined from depth sensing indentation tests.
Links
| MSM0021622411, plan (intention) |
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| 1K05025, research and development project |
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