Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries

OHLÍDAL, Ivan, František VIŽĎA and Miloslav OHLÍDAL. Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries. Optical Engineering. 1995, vol. 34, No 6, p. 1761-1768. ISSN 0091-3286.

Basic information

• Original name: Optical analysis by means of spectroscopic reflectometry of single and double layers with correlated randomly rough boundaries
• Name in Czech: Optická analýza pomocí spektroskopické reflektometrie jenoduchých a dvojitých vrstev s korelovanými náhodnými rozhraními
• Authors: OHLÍDAL, Ivan, František VIŽĎA and Miloslav OHLÍDAL.
• Edition: Optical Engineering, 1995, 0091-3286.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10306 Optics
• Country of publisher: United Kingdom of Great Britain and Northern Ireland
• Confidentiality degree: is not subject to a state or trade secret
• Organization unit: Faculty of Science
• Keywords (in Czech): odrazivost jenoduchých a dvojitých vrstev; drsnost rozhraní vrstev; korelace rozhraní
• Keywords in English: reflectance of single and double layers; roughness of boundaries of layers; correlation of boundaries
• Tags: International impact, Reviewed

Abstract

Optical analysis of rough single and double layers is performed by interpreting the spectral dependences of the measured coherent reflectance. Formulas for the coherent reflectance of these systems derived within the scalar theory of diffraction of light are used for this interpretation. Possibilities and limitations of the method utilized are illustrated using several concrete samples of both the rough single and double layers represented by models corresponding to fully correlated (identical), partially correlated, and fully uncorrelated boundaries. It is shown that the values of the optical parameters, the root-mean-square (rms) values of the heights of the boundary irregularities and the values of the cross-correlation coefficients of the boundaries characterizing the layered systems mentioned can be determined within the method described.

Links

• GA101/94/0555, research and development project: Name: Měření povrchové drsnosti z úhlové korelace polí koherenční zrnitosti

Investor: Czech Science Foundation, The Surface Roughness Measurement by Angle Correlation of Speckle Fields