MEDUŇA, Mojmír, Ondřej CAHA, Mario KEPLINGER, Julian STANGL, Günther BAUER, Gregor MUSSLER a Detlev GRÜTZMACHER. Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction. Physica stat.sol.(a). roč. 206, č. 8, s. 1775-1779. ISSN 1862-6300. 2009. |
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@article{862438, author = {Meduňa, Mojmír and Caha, Ondřej and Keplinger, Mario and Stangl, Julian and Bauer, Günther and Mussler, Gregor and Grützmacher, Detlev}, article_number = {8}, keywords = {interdiffusion; x-ray diffraction; multilayers}, language = {eng}, issn = {1862-6300}, journal = {Physica stat.sol.(a)}, title = {Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction}, volume = {206}, year = {2009} }
TY - JOUR ID - 862438 AU - Meduňa, Mojmír - Caha, Ondřej - Keplinger, Mario - Stangl, Julian - Bauer, Günther - Mussler, Gregor - Grützmacher, Detlev PY - 2009 TI - Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction JF - Physica stat.sol.(a) VL - 206 IS - 8 SP - 1775-1779 EP - 1775-1779 SN - 18626300 KW - interdiffusion KW - x-ray diffraction KW - multilayers N2 - We have investigated SiGe/Si multilayers with Ge content 70% and 90% annealed in-situ at temperatures in the range 600-700 C by x-ray diffraction. ER -
MEDUŇA, Mojmír, Ondřej CAHA, Mario KEPLINGER, Julian STANGL, Günther BAUER, Gregor MUSSLER a Detlev GRÜTZMACHER. Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction. \textit{Physica stat.sol.(a)}. roč.~206, č.~8, s.~1775-1779. ISSN~1862-6300. 2009.
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