| MEDUŇA, Mojmír, Ondřej CAHA, Mario KEPLINGER, Julian STANGL, Günther BAUER, Gregor MUSSLER and Detlev GRÜTZMACHER. Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction. Physica stat.sol.(a). 2009, vol. 206, No 8, p. 1775-1779. ISSN 1862-6300. |
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@article{862438,
author = {Meduňa, Mojmír and Caha, Ondřej and Keplinger, Mario and Stangl, Julian and Bauer, Günther and Mussler, Gregor and Grützmacher, Detlev},
article_number = {8},
keywords = {interdiffusion; x-ray diffraction; multilayers},
language = {eng},
issn = {1862-6300},
journal = {Physica stat.sol.(a)},
title = {Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction},
volume = {206},
year = {2009}
}
TY - JOUR
ID - 862438
AU - Meduňa, Mojmír - Caha, Ondřej - Keplinger, Mario - Stangl, Julian - Bauer, Günther - Mussler, Gregor - Grützmacher, Detlev
PY - 2009
TI - Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction
JF - Physica stat.sol.(a)
VL - 206
IS - 8
SP - 1775-1779
EP - 1775-1779
SN - 18626300
KW - interdiffusion
KW - x-ray diffraction
KW - multilayers
N2 - We have investigated SiGe/Si multilayers with Ge content 70% and 90% annealed in-situ at temperatures in the range 600-700 C by x-ray diffraction.
ER -
MEDUŇA, Mojmír, Ondřej CAHA, Mario KEPLINGER, Julian STANGL, Günther BAUER, Gregor MUSSLER and Detlev GRÜTZMACHER. Interdiffusion in Ge rich SiGe/Ge multilayers studied by in situ diffraction. \textit{Physica stat.sol.(a)}. 2009, vol.~206, No~8, p.~1775-1779. ISSN~1862-6300.
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