MEDUŇA, Mojmír, Ondřej CAHA, Josef KUBĚNA, Alan KUBĚNA and Jiří BURŠÍK. Homogenization of CZ Si wafers by Tabula Rasa annealing. Physica B condensed matter. Amsterdam: Elsevier Science, 2009, vol. 404, 23-24, p. 4637–4640. ISSN 0921-4526. |
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@article{862444, author = {Meduňa, Mojmír and Caha, Ondřej and Kuběna, Josef and Kuběna, Alan and Buršík, Jiří}, article_location = {Amsterdam}, article_number = {23-24}, keywords = {Silicon; Infra red; Precipitates}, language = {eng}, issn = {0921-4526}, journal = {Physica B condensed matter}, title = {Homogenization of CZ Si wafers by Tabula Rasa annealing}, volume = {404}, year = {2009} }
TY - JOUR ID - 862444 AU - Meduňa, Mojmír - Caha, Ondřej - Kuběna, Josef - Kuběna, Alan - Buršík, Jiří PY - 2009 TI - Homogenization of CZ Si wafers by Tabula Rasa annealing JF - Physica B condensed matter VL - 404 IS - 23-24 SP - 4637–4640 EP - 4637–4640 PB - Elsevier Science SN - 09214526 KW - Silicon KW - Infra red KW - Precipitates N2 - The differences in oxygen precipitation, precipitate morphology and evolution of point defects in samples with and without Tabula Rasa applied were studied by experimental techniques such us infrared absorption spectroscopy, transmission electron microscopy, etching techniques and x-ray diffraction. ER -
MEDUŇA, Mojmír, Ondřej CAHA, Josef KUBĚNA, Alan KUBĚNA and Jiří BURŠÍK. Homogenization of CZ Si wafers by Tabula Rasa annealing. \textit{Physica B condensed matter}. Amsterdam: Elsevier Science, 2009, vol.~404, 23-24, p.~4637–4640. ISSN~0921-4526.
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