Detailed Information on Publication Record
2009
Homogenization of CZ Si wafers by Tabula Rasa annealing
MEDUŇA, Mojmír, Ondřej CAHA, Josef KUBĚNA, Alan KUBĚNA, Jiří BURŠÍK et. al.Basic information
Original name
Homogenization of CZ Si wafers by Tabula Rasa annealing
Name in Czech
Homogenizace CZ Si desek pomocí žíhání Tabula Rasa
Authors
MEDUŇA, Mojmír (203 Czech Republic, guarantor), Ondřej CAHA (203 Czech Republic), Josef KUBĚNA (203 Czech Republic), Alan KUBĚNA (203 Czech Republic) and Jiří BURŠÍK (203 Czech Republic)
Edition
Physica B condensed matter, Amsterdam, Elsevier Science, 2009, 0921-4526
Other information
Language
English
Type of outcome
Článek v odborném periodiku
Field of Study
10302 Condensed matter physics
Country of publisher
Netherlands
Confidentiality degree
není předmětem státního či obchodního tajemství
Impact factor
Impact factor: 1.056
RIV identification code
RIV/00216224:14310/09:00029728
Organization unit
Faculty of Science
UT WoS
000276029300038
Keywords (in Czech)
křemík; infra red; precipitáty
Keywords in English
Silicon; Infra red; Precipitates
Tags
International impact, Reviewed
Změněno: 4/1/2010 12:28, Mgr. Mojmír Meduňa, Ph.D.
V originále
The differences in oxygen precipitation, precipitate morphology and evolution of point defects in samples with and without Tabula Rasa applied were studied by experimental techniques such us infrared absorption spectroscopy, transmission electron microscopy, etching techniques and x-ray diffraction.
In Czech
Rozdíly v precipitaci kyslíku, morfologie precipitátů a vývoj bodových defektů byly studovány pomocí experimentálních technik jako jsou infračervená absorpce, transmisní elektronová mikroskopie, leptací techniky a rtg difrakce.
Links
| GA202/09/1013, research and development project |
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| MSM0021622410, plan (intention) |
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