| MEDUŇA, Mojmír, Ondřej CAHA, Josef KUBĚNA, Alan KUBĚNA and Jiří BURŠÍK. Homogenization of CZ Si wafers by Tabula Rasa annealing. Physica B condensed matter. Amsterdam: Elsevier Science, 2009, vol. 404, 23-24, p. 4637–4640. ISSN 0921-4526. |
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@article{862444,
author = {Meduňa, Mojmír and Caha, Ondřej and Kuběna, Josef and Kuběna, Alan and Buršík, Jiří},
article_location = {Amsterdam},
article_number = {23-24},
keywords = {Silicon; Infra red; Precipitates},
language = {eng},
issn = {0921-4526},
journal = {Physica B condensed matter},
title = {Homogenization of CZ Si wafers by Tabula Rasa annealing},
volume = {404},
year = {2009}
}
TY - JOUR
ID - 862444
AU - Meduňa, Mojmír - Caha, Ondřej - Kuběna, Josef - Kuběna, Alan - Buršík, Jiří
PY - 2009
TI - Homogenization of CZ Si wafers by Tabula Rasa annealing
JF - Physica B condensed matter
VL - 404
IS - 23-24
SP - 4637–4640
EP - 4637–4640
PB - Elsevier Science
SN - 09214526
KW - Silicon
KW - Infra red
KW - Precipitates
N2 - The differences in oxygen precipitation, precipitate morphology and evolution of point defects in samples with and without Tabula Rasa applied were studied by experimental techniques such us infrared absorption spectroscopy, transmission electron microscopy, etching techniques and x-ray diffraction.
ER -
MEDUŇA, Mojmír, Ondřej CAHA, Josef KUBĚNA, Alan KUBĚNA and Jiří BURŠÍK. Homogenization of CZ Si wafers by Tabula Rasa annealing. \textit{Physica B condensed matter}. Amsterdam: Elsevier Science, 2009, vol.~404, 23-24, p.~4637–4640. ISSN~0921-4526.
|
