| NAVRÁTIL, Zdeněk, Oto BRZOBOHATÝ and David TRUNEC. Determination of electron density in RF discharge in neon by emission spectroscopy complemented with C-R model and PIC/MC simulation. In Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8. Brno: Brno University of Technology, 2009, 1 pp. ISBN 978-80-214-3875-0. |
Other formats:
BibTeX
LaTeX
RIS
@inproceedings{862503,
author = {Navrátil, Zdeněk and Brzobohatý, Oto and Trunec, David},
address = {Brno},
booktitle = {Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8},
keywords = {neon; RF discharge; electron density; c-r model; optical spectroscopy},
language = {eng},
location = {Brno},
isbn = {978-80-214-3875-0},
publisher = {Brno University of Technology},
title = {Determination of electron density in RF discharge in neon by emission spectroscopy complemented with C-R model and PIC/MC simulation},
year = {2009}
}
TY - JOUR
ID - 862503
AU - Navrátil, Zdeněk - Brzobohatý, Oto - Trunec, David
PY - 2009
TI - Determination of electron density in RF discharge in neon by emission spectroscopy complemented with C-R model and PIC/MC simulation
PB - Brno University of Technology
CY - Brno
SN - 9788021438750
KW - neon
KW - RF discharge
KW - electron density
KW - c-r model
KW - optical spectroscopy
N2 - The aim of this work was to determine the electron density in the RF discharge in neon from the absolute intensity measurement of neon spectra. The measured optical emission spectra were compared with the spectra calculated by the collisional-radiative model. The electron distribution function, needed for these calculations, was determined from 1D Particle-in-Cell/Monte Carlo model. The electron density was determined with spatial resolution over the discharge gap, reaching peak value of about 1.7 x 10^10 cm-3 in the middle.
ER -
NAVRÁTIL, Zdeněk, Oto BRZOBOHATÝ and David TRUNEC. Determination of electron density in RF discharge in neon by emission spectroscopy complemented with C-R model and PIC/MC simulation. In \textit{Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8}. Brno: Brno University of Technology, 2009, 1 pp. ISBN~978-80-214-3875-0.
|
