CAHA, Ondřej, Josef KUBĚNA, Alan KUBĚNA and Mojmír MEDUŇA. Vacancies and self-interstitials dynamics in silicon wafers. Solid State Phenomena. Switzerland: Trans Tech Publications, 2009, Neuveden, 156-158, p. 139-144. ISSN 1012-0394.
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Basic information
Original name Vacancies and self-interstitials dynamics in silicon wafers
Name in Czech Dynamika vakancí a intersticiálů v Si deskách
Authors CAHA, Ondřej (203 Czech Republic, guarantor), Josef KUBĚNA (203 Czech Republic), Alan KUBĚNA (203 Czech Republic) and Mojmír MEDUŇA (203 Czech Republic).
Edition Solid State Phenomena, Switzerland, Trans Tech Publications, 2009, 1012-0394.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10302 Condensed matter physics
Country of publisher Switzerland
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 0.493 in 2005
RIV identification code RIV/00216224:14310/09:00029732
Organization unit Faculty of Science
Keywords (in Czech) křemík; vacance; intersticiály; nukleace
Keywords in English Silicon; vacancies; Interstitials; nucleation
Tags International impact, Reviewed
Changed by Changed by: Mgr. Mojmír Meduňa, Ph.D., učo 7898. Changed: 4/1/2010 17:22.
Abstract
This work deals mainly with the nucleation of vacancies during RTA concerning various cooling rates and initial states.
Abstract (in Czech)
Tato práce se zabývá především nukleací vakancí během RTA zahrnujícím různé stupně chlazení a počáteční stavy.
Links
GA202/09/1013, research and development projectName: Nukleace a růst kyslíkových precipitátů v křemíku
Investor: Czech Science Foundation, Nucleation and growth of oxygen precipitates in silicon
MSM0021622410, plan (intention)Name: Fyzikální a chemické vlastnosti pokročilých materiálů a struktur
Investor: Ministry of Education, Youth and Sports of the CR, Physical and chemical properties of advanced materials and structures
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