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@inproceedings{866790,
author = {Kulha, P. and Boura, A. and Husák, M. and Mikulík, Petr and Kučera, Milan and Valenda, Stanislav},
address = {New York},
booktitle = {7th International Conference on Advanced Semiconductor Devices and Microsystems},
keywords = {High-Temperature SOI Strain-Gauges; sensors},
language = {eng},
location = {New York},
isbn = {978-1-4244-2325-5},
pages = {175-178},
publisher = {IEEE},
title = {Design and Fabrication of High-Temperature SOI Strain-Gauges},
year = {2008}
}
TY - JOUR
ID - 866790
AU - Kulha, P. - Boura, A. - Husák, M. - Mikulík, Petr - Kučera, Milan - Valenda, Stanislav
PY - 2008
TI - Design and Fabrication of High-Temperature SOI Strain-Gauges
PB - IEEE
CY - New York
SN - 9781424423255
KW - High-Temperature SOI Strain-Gauges
KW - sensors
N2 - The following paper introduces the CoventorWare design environment for SOI based piezoresistive sensor design. Fabrication process and characterization of designed sensors is also presented. The software package Coventor Ware has been used for design of mechanical and electrical characteristics of the structure. The tools enable design, modelling and successive modification of designed MEMS structures. The program enables: drawing of 2D layout and its editing, simulation of production process, generation of 3D model from 2D masks, generation of network by the method of finite elements, solution of mechanical, piezoresistive, thermal and further simulations. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed.
ER -
KULHA, P., A. BOURA, M. HUSÁK, Petr MIKULÍK, Milan KUČERA and Stanislav VALENDA. Design and Fabrication of High-Temperature SOI Strain-Gauges. In \textit{7th International Conference on Advanced Semiconductor Devices and Microsystems}. New York: IEEE, 2008, p.~175-178. ISBN~978-1-4244-2325-5.
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