Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications. Online. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002. xxviii, 62. ISBN 0815514425. [citováno 2024-04-24] |
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\textit{Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications}. Online. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002. xxviii, 62. ISBN~0815514425. [citováno 2024-04-24]
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