Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002, xxviii, 62. ISBN 0815514425.

Basic information

Original name

Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

Authors

Edited by Krishna Seshan.

Edition

2nd ed. Norwich, N.Y. xxviii, 62, 2002

Publisher

Noyes Publications

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Other information

ISBN

0815514425