Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and ...
Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002, xxviii, 62. ISBN 0815514425. |
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Original name | Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications |
Authors | Edited by Krishna Seshan. |
Edition | 2nd ed. Norwich, N.Y. xxviii, 62, 2002. |
Publisher | Noyes Publications |
Other information | |
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ISBN | 0815514425 |
Changed by | The record has been imported from the library system. Changed: 8/8/2022 14:00. |
PrintDisplayed: 1/9/2024 01:50