Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications. Edited by Krishna Seshan. 2nd ed. Norwich, N.Y.: Noyes Publications, 2002. xxviii, 62. ISBN 0815514425.
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Basic information
Original name Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications
Authors
Edited by Krishna Seshan.
Edition 2nd ed. Norwich, N.Y. xxviii, 62, 2002.
Publisher Noyes Publications
Other information
ISBN 0815514425
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