J 2010

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

ZAJÍČKOVÁ, Lenka, Ondřej JAŠEK, Marek ELIÁŠ, Petr SYNEK, Lukáš LAZAR et. al.

Basic information

Original name

Synthesis of carbon nanotubes by plasma-enhanced chemical vapor deposition in an atmospheric-pressure microwave torch

Authors

ZAJÍČKOVÁ, Lenka (203 Czech Republic, guarantor, belonging to the institution), Ondřej JAŠEK (203 Czech Republic, belonging to the institution), Marek ELIÁŠ (203 Czech Republic, belonging to the institution), Petr SYNEK (203 Czech Republic, belonging to the institution), Lukáš LAZAR (203 Czech Republic, belonging to the institution), Oldřich SCHNEEWEISS (203 Czech Republic) and Renáta HANZLÍKOVÁ (203 Czech Republic)

Edition

Pure and Applied Chemistry, 2010, 0033-4545

Other information

Language

English

Type of outcome

Článek v odborném periodiku

Field of Study

10305 Fluids and plasma physics

Country of publisher

United States of America

Confidentiality degree

není předmětem státního či obchodního tajemství

References:

Impact factor

Impact factor: 2.134

RIV identification code

RIV/00216224:14310/10:00040527

Organization unit

Faculty of Science

UT WoS

000279063900008

Keywords (in Czech)

katalyzátor; mikrovlnný pochodňový výboj; pecvd; rastrovací mikroskopie

Keywords in English

catalyst; microwave torch; plasma-enhanced chemical vapor deposition; scanning electron microscopy

Tags

International impact, Reviewed
Změněno: 27/3/2013 09:11, doc. Mgr. Lenka Zajíčková, Ph.D.

Abstract

V originále

There are many different techniques for the synthesis of carbon nanotubes (CNTs), and plasma technologies experience a significant competitor in thermal chemical vapor deposition (CVD) processes. A particular process is, therefore, selected according to the specific requirements of an application, which clearly differ for the development of composites as compared to nanoelectronics, field emission, displays, sensors, and the like. This paper discusses the method for the synthesis of CNTs using an atmospheric-pressure microwave (MW) torch. It was successfully applied in the fast deposition of multiwalled nanotubes (MWNTs) on a substrate without the necessity of any vacuum or heating equipment. Dense straight-standing nanotubes were prepared on Si substrates with and also without barrier SiOx layer. Therefore, it was possible to produce CNTs directly on conductive Si and to use them as an electron-emitting electrode of the gas pressure sensor. The CNTs grown in MW torch were also used to create a gas sensor based on the changes of electrical resistance measured between two planar electrodes connected by the CNTs.

In Czech

V článku je uveden krátký souhrn aplikací a metod produkce uhlíkových nanotrubek se zvláštní zřetelem na produkci nanotrubek v mikrovlnném plazmovém hořáku za atmosferického tlaku. Jeho vysokou efektivitou pro růst CNT přímo na Si substrátech s možností selektivního růstu. V závěru je popsáno využití těchto Si/CNT vzorků odporových senzorů plynů.

Links

GAP205/10/1374, research and development project
Name: Syntéza uhlíkových nanotrubek plazmochemickou metodou a studium jejich funkčních vlastností
Investor: Czech Science Foundation
GA202/08/0178, research and development project
Name: Syntéza magnetických nanočástic na bázi Fe v nízkoteplotním mikrovlnném plazmatu
Investor: Czech Science Foundation, Synthesis of Fe-based magnetic nanoparticles in low-temperature microwave plasma
GD104/09/H080, research and development project
Name: Plazmochemické procesy a jejich technologické aplikace
Investor: Czech Science Foundation
KAN311610701, research and development project
Name: Nanometrologie využívající metod rastrovací sondové mikroskopie
Investor: Academy of Sciences of the Czech Republic
MSM0021622411, plan (intention)
Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface