KARÁSKOVÁ, Monika, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS, Olga BLÁHOVÁ and Jiří ŠPERKA. Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges. Surface & coatings technology. Elsevier Science, 2010, vol. 204, 12-13, p. 1997–2001. ISSN 0257-8972. |
Other formats:
BibTeX
LaTeX
RIS
@article{895715, author = {Karásková, Monika and Zajíčková, Lenka and Buršíková, Vilma and Franta, Daniel and Nečas, David and Bláhová, Olga and Šperka, Jiří}, article_number = {12-13}, keywords = {ultrananocrystalline diamond; bias enhanced nucleation; indentation hardness; ellipsometry; FTIR}, language = {eng}, issn = {0257-8972}, journal = {Surface & coatings technology}, title = {Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges}, volume = {204}, year = {2010} }
TY - JOUR ID - 895715 AU - Karásková, Monika - Zajíčková, Lenka - Buršíková, Vilma - Franta, Daniel - Nečas, David - Bláhová, Olga - Šperka, Jiří PY - 2010 TI - Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges JF - Surface & coatings technology VL - 204 IS - 12-13 SP - 1997–2001 EP - 1997–2001 PB - Elsevier Science SN - 02578972 KW - ultrananocrystalline diamond KW - bias enhanced nucleation KW - indentation hardness KW - ellipsometry KW - FTIR N2 - Ultrananocrystalline diamond (UNCD) films were deposited directly on polished c-Si substrates in microwave discharge (2.45 GHz) combined with rf capacitive plasma (13.56 MHz) ignited at the substrate electrode. The rf discharge induced a dc self-bias accelerating ions towards the growing film during the whole deposition process. The substrate was either preheated in hydrogen discharge to the deposition temperature of 900 C or the deposition of intermediate layer started at about 200 C and reached 900 C in the 5th minute. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analysis of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing DLC and SiC materials. ER -
KARÁSKOVÁ, Monika, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ, Daniel FRANTA, David NEČAS, Olga BLÁHOVÁ and Jiří ŠPERKA. Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges. \textit{Surface \&{} coatings technology}. Elsevier Science, 2010, vol.~204, 12-13, p.~1997–2001. ISSN~0257-8972.
|