Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range

FRANTA, Daniel, David NEČAS, Lenka ZAJÍČKOVÁ, Vilma BURŠÍKOVÁ and Christoph COBET. Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range. Diamond and Related Materials. Amsterdam: Elsevier, 2010, vol. 19, 2-3, p. 114-122. ISSN 0925-9635.

Basic information

• Original name: Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range
• Authors: FRANTA, Daniel (203 Czech Republic, guarantor, belonging to the institution), David NEČAS (203 Czech Republic, belonging to the institution), Lenka ZAJÍČKOVÁ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Christoph COBET (276 Germany).
• Edition: Diamond and Related Materials, Amsterdam, Elsevier, 2010, 0925-9635.

Other information

• Original language: English
• Type of outcome: Article in a journal
• Field of Study: 10305 Fluids and plasma physics
• Country of publisher: Netherlands
• Confidentiality degree: is not subject to a state or trade secret
• Impact factor: Impact factor: 1.825
• RIV identification code: RIV/00216224:14310/10:00040194
• Organization unit: Faculty of Science
• UT WoS: 000275101800004
• Keywords in English: Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Band structure
• Tags: International impact, Reviewed

Abstract

The sample of hydrogenated DLC on c-Si prepared by PECVD technique was investigated by ellipsometry in the NIR-UV range (0.6-6.5 eV), synchrotron ellipsometry in the UV-XUV range (4-20 eV) and reflectometry in NIR-UV range (1.24-6.5 eV). Various dispersion models based on the parametrization of density of states (PDOS) were investigated concerning their application in wide spectral range extending to XUV. In conclusion, the further developed PDOS model demonstrated its applicability to correct the calculation of the dielectric response of hydrogenated DLC material in the wide spectral range. Naturally, it can be used for any other disordered materials and it will, together with the optical measurements extended to XUV, bring important information about their band structure.

Links

• FT-TA5/114, research and development project: Name: Vývoj technologie vytváření PECVD vrstev pro výrobu automobilové světelné techniky

Investor: Ministry of Industry and Trade of the CR, Development of technology of PECVD films formation for automotive lighting equipment

• GA202/07/1669, research and development project: Name: Depozice termomechanicky stabilních nanostrukturovaných diamantu-podobných tenkých vrstev ve dvojfrekvenčních kapacitních výbojích

Investor: Czech Science Foundation, Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges

• MSM0021622411, plan (intention): Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek

Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface