SOUČEK, Pavel, Abdelazziz EL MEL, Pierre-Yves TESSIER, Marek ELIÁŠ, Vilma BURŠÍKOVÁ and Petr VAŠINA. Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD. In Potencial and Application of Nanotreatment of Medical Surfaces. 1. edition. Liberec: Technical University of Liberec, 2010, p. 63-64. ISBN 978-80-7372-631-7.
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Basic information
Original name Deposition and characterization of nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD
Name in Czech Depozice a charakterizace nc-TiC/a-C:H povlaků připravených hybridním PVD-PECVD
Authors SOUČEK, Pavel (203 Czech Republic), Abdelazziz EL MEL (250 France), Pierre-Yves TESSIER (250 France), Marek ELIÁŠ (203 Czech Republic, belonging to the institution), Vilma BURŠÍKOVÁ (203 Czech Republic, belonging to the institution) and Petr VAŠINA (203 Czech Republic, guarantor, belonging to the institution).
Edition 1. edition. Liberec, Potencial and Application of Nanotreatment of Medical Surfaces, p. 63-64, 2 pp. 2010.
Publisher Technical University of Liberec
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Publication form printed version "print"
RIV identification code RIV/00216224:14310/10:00044661
Organization unit Faculty of Science
ISBN 978-80-7372-631-7
Keywords (in Czech) magnetronové naprašování; povlak; nanokompozit; mechanické vlastnosti
Keywords in English magnetron sputtering; coating; nanocomposite; mechanical properties
Changed by Changed by: doc. Mgr. Pavel Souček, Ph.D., učo 175085. Changed: 6/3/2014 10:54.
Abstract
Several micrometers thick nc-TiC/a-C:H films were prepared by sputtering of the Ti target in a mixture of argon and acetylene gases. Polished steel substrates were used to come close to industrial conditions of usage of such films. The initial temperature of the steel substrates was found to have a significant impact on the quality of the deposited nc-TiC/a-C:H films.
Abstract (in Czech)
Rozprašováním titanového terče ve směsi argonu a acetylenu byly připraveny několik mikrometrů tlusté nc-TiC/a-C:H vrstvy. Pro přiblížení se průmyslovým podmínkám využití těchto vrstev byly použity leštěné ocelové substráty. Byl pozorován silný vliv počáteční teploty ocelových substrátů na výslednou kvalitu nc-TiC/a-C:H vrstev.
Links
GP202/08/P038, research and development projectName: Studium chování hybridního depozičního procesu a jeho využití pro přípravu tenkých vrstev
Investor: Czech Science Foundation, Study of hybrid deposition process and its application for thin film deposition
MSM0021622411, plan (intention)Name: Studium a aplikace plazmochemických reakcí v neizotermickém nízkoteplotním plazmatu a jeho interakcí s povrchem pevných látek
Investor: Ministry of Education, Youth and Sports of the CR, Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
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